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X-Ray Metrology in Semiconductor Manufacturing

X-Ray Metrology in Semiconductor Manufacturing( )
Author: Tanner, Brian K.
Bowen, D. Keith
ISBN:978-0-8493-3928-8
Publication Date:Jan 2006
Publisher:CRC Press LLC
Book Format:Hardback
List Price:USD $225.00
Book Description:

Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and magnetics industries. The authors discuss the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. The book covers the essential metrological questions of precision and...
More Description

Book Details
Pages:296
Detailed Subjects: Technology & Engineering / Electronics / Semiconductors
Technology & Engineering / Electronics / Circuits / Integrated
Science / Physics / Optics & Light
Physical Dimensions (W X L X H):6.201 x 9.477 x 0.741 Inches
Book Weight:1.2 Pounds



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