Multilayer Integrated Film Bulk Acoustic Resonators |
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Author:
| Zhang, Yafei Chen, Da |
ISBN: | 978-3-642-31775-0 |
Publication Date: | Aug 2012 |
Publisher: | Springer Berlin / Heidelberg
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Imprint: | Springer |
Book Format: | Hardback |
List Price: | USD $109.99 |
Book Description:
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This book surveys the theory, design, fabrication and application multilayer integrated film bulk acoustic resonators. Covers use in integrated circuits, optical devices, acoustic resonators, micro-nano manufacturing, multilayer integration, and more.
This book surveys the theory, design, fabrication and application multilayer integrated film bulk acoustic resonators. Covers use in integrated circuits, optical devices, acoustic resonators, micro-nano manufacturing, multilayer integration, and more.