Microsensors Principles and Applications |
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| Author:
| Gardner, J. W. |
| ISBN: | 978-0-471-94135-4 |
| Publication Date: | Sep 1994 |
| Publisher: | John Wiley & Sons, Incorporated
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| Book Format: | Hardback |
| List Price: | USD $225.00 |
Book Description:
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The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors-the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.
The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors-the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.