Glow Discharge Processes Sputtering and Plasma Etching |
|
| Author:
| Chapman, Brian |
| ISBN: | 978-0-471-07828-9 |
| Publication Date: | Sep 1980 |
| Publisher: | John Wiley & Sons, Incorporated
|
| Imprint: | Wiley-Interscience |
| Book Format: | Hardback |
| List Price: | USD $284.95 |
Book Description:
|
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals.
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals.